Back to equipment

Thin film deposition system
SHM Phoenix

  • Manufacturer: SHM s. r. o., Czech Republic
  • Sputtering source: rotary cylindrical
  • Target: segmented (W, Ta, B4C, C)
  • Power supply: DC
  • Deposition temperature: 20 °C - 550 °C
  • Base pressure: 2E-5 Pa
  • Additional infofmation: plaetary sample rotation, LGD