Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy
P. Vašina, M. Fekete, J. Hnilica, P. Klein, L. Dosoudilová, P. Dvořák, Z. Navrátil
Paper presents a method using effective branching fractions which enables us to determine the density of titanium atoms and ions from the intensity of self-absorbed spectral lines. The method is based on the fitting of theoretically calculated branching fractions to experimentally measured ratios of the relative intensities of selected resonant titanium atomic and ionic lines. The method was successfully applied on DC and HiPIMS discharge.
Understanding of hybrid PVD-PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron
R. Žemlička, M. Jílek, P. Vogl, P. Souček, V. Buršíková, J. Buršík, P. Vašina
Paper presents a study dealing with diagnostics and understanding of hybrid PVD-PECVD deposition process from titanium target in the atmosphere enriched with the acetylene gas. Coatings were prepared using an industrial deposition system. Based on comparison between the process properties and their films produced, the parameters are proposed for the algorithm used for the industrial deposition nc-TiC/a-C:H coatings.
Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure and mechanical properties
P. Souček, J. Daniel, J. Hnilica, K. Bernátová, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Paper presents a comparative study where deposition process as well as nc-TiC/a-C:H films produced using direct current magnetron sputtering are compared to those produced by high power impulse magnetron sputtering. The differences occurring during the deposition process are identified. Additionally, determined structure differences between the films prepared by both methods are used to explain the improved mechanical properties observed for the films created by high power impulse magnetron sputtering.
Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
P. Klein, F. Lockwood Estrin, J. Hnilica, P. Vašina, J.W. Bradley
Paper presents a study of ionization zones called spokes to which plasma self-organizes during the HiPIMS pulse. For the study simultaneous measurement of fast camera and a novel plasma diagnostic method of strip probes were utilized. The dual diagnostic system allowed to observe merging and splitting of spokes over time. It was found, that spokes merge and split seemingly randomly in time, but their amount always oscillates around some stable configuration. A simple phenomenological model was developed that related the number of observed spokes to the spoke dimensions, spoke velocity and gas atom velocity.
List of all publications
2020
- Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings
M. Kroker, P. Souček, P. Matej, L. Zábranský, Z. Czigány, K. Balázsi, P. Vašina
Coatings 10(9) (2020) 853 - Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Journal of Applied Physics 128 (2020) 043304 - Revisiting particle dynamics in HiPIMS discharges. I. General effects
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Journal of Applied Physics 128 (2020) 043303 - Effect of substrate bias voltage on the composition, microstructure and mechanical properties of W-B-C coatings
S. Mirzaei, M. Alishahi, P. Souček, V. Buršíková, L.Zábranský, L.Gröner, F. Burmeister, B. Blug, Ph. Daum, R. Mikšová, P. Vašina
Applied Surface Science 528 (2020) 146966 - Optical spectroscopy for sputtering process characterization
N. Britun, J. Hnilica
Journal of Applied Physics 127 (2020) 211101 - Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
K. Bernátová, M. Fekete, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 29 (2020) 055010 - Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge
M. Šlapanská, A. Hecimovic, J. T. Gudmundsson, J. Hnilica, W. Breilmann, P. Vasina, A. von Keudell
Journal of Physics D: Applied Physics 53 (2020) 155201 - The effect of chemical composition on the structure, chemistry and mechanical properties of magnetron sputtered W-B-C coatings: Modeling and experiments
S. Mirzaei, M. Alishahi, P. Souček, J. Ženíšek, D. Holec, N. Koutná, V. Buršíková, M. Stupavská, L. Zábranský, F. Burmeister, B. Blug, Zs. Czigány, K. Balázsi, R. Mikšová, P. Vašina
Surface and Coatings Technology 383 (2020) 125274 - Adhesion and dynamic impact wear of nanocomposite TiC-based coatings prepared by DCMS and HiPIMS
J. Daniel, P. Souček, J. Grossman, L. Zábranský, K. Bernátová, V. Buršíková, T. Fořt, P. Vašina, J. Sobota
International Journal of Refractory Metals and Hard Materials 86 (2020) 105123 - Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
K. von Fieandt, E. M. Paschalidou, A. Srinath, P. Souček, L. Riekehr, L. Nyholm, E. Lewin,
Thin Solid Films 693 (2020) 137685 - Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture
M. Fekete, K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 29 (2020) 025027
2019
- Study of W-B-C thin films prepared by magnetron sputtering using a combinatorial approach
S. Debnárová, L. Zábranský, P. Souček, V.Buršíková, P. Vašina
International Journal of Refractory Metals and Hard Materials 85 (2019) 105066 - Microstructural changes of amorphous Mo–B–C coatings upon thermal annealing
L. Zábranský, P. Souček, P. Vašina, J. Dugáček, P. Sťahel, J. Buršík, M. Svoboda, R. Mikšová, V. Peřina, K. Balázsi, Z. Czigány, V. Buršíková
Surface and Coatings Technology 379 (2019) 125052 - On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target
M. Kroker, Zs. Czigány, Z. Weiss, M. Fekete, P. Souček, K. Balázsi, V. Sochora, M. Jílek, P. Vašina
Surface and Coatings Technology 377 (2019) 124864 - Evolution of discharge parameters and sputtered species ionization in reactive HiPIMS with oxygen, nitrogen and acetylene
M. Fekete, K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 28 (2019) 025011 - Effect of bonding structure on hardness and fracture resistance of W-B-C coatings with varying B/W ratio
S. Mirzaei, M. Alishahi, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, V. Peřina, K. Balázsi, Zs. Czigány, P. Vašina
Surface & Coatings Technology 358 (2019) 843-849 - The statistics of spoke configurations in high-power impulse magnetron sputtering discharges
P. Klein , J. Hnilica, M. Zemánek, J. W. Bradley, P. Vašina
Journal of Physics D: Applied Physics 52 (2019) 125201
2018
- The tribological properties of short range ordered W-B-C protective coatings prepared by pulsed magnetron sputtering
S. Debnárova, P. Souček, P. Vašina, L. Zábranský, V. Buršíková, S. Mirzaei, Y. Pei
Surface & Coatings Technology 357 (2018) 364-371 - Effect of magnetic field on spoke behaviour in HiPIMS plasma
J. Hnilica, P. Klein, M. Šlapanská, M. Fekete, P. Vašina
Journal of Physics D: Applied Physics 51 (2018) 095204 - Evolution of structure and mechanical properties of hard yet fracture resistant W-B-C coatings with varying C/W ratio
M. Alishahi, S. Mirzaei, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, V. Peřina, K. Balázsi, Zs. Czigány, P. Vašina
Surface & Coatings Technology 340 (2018) 103-111 - Fracture resistance enhancement in hard Mo-B-C coatings tailored by composition and microstructure
P. Souček, L. Zábranský, V. Buršíková, J. Buršík, S. Debnarova, M. Svoboda, V. Perina, P. Vašina
Journal of Nanomaterials (2018) 5184584
2017
- Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS
M. Fekete, J. Hnilica, C. Vitelaru, T. Minea, P. Vašina
Journal of Physics D: Applied Physics 50 (2017) 365202 - On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings
J. Daniel, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Surface & Coatings Technology 328 (2017) 462-468 - Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings
J. Daniel, P. Souček, K. Bernátová, L. Zábranský, M. Stupavská, V. Buršíková, P. Vašina
Journal of Nanomaterials 166 (2017) 1-13 - Thermal stability of hard nanocomposite Mo-B-C coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, J. Dugáček, P. Sťahel, J. Buršík, M. Svoboda, V. Peřina
Vacuum 138 (2017) 199-204 - On the significance of running-in of hard nc-TiC/a-C:H coating for short-term repeating machining
R. Žemlička, P. Souček, P. Vogl, M. Jílek, V. Buršíková, P. Vašina, Y. Pei
Surface & Coatings Technology 315 (2017) 17-23 - Cathode voltage and discharge current oscillations in HiPIMS
P. Klein, J. Hnilica, Z. Hubička, M. Čada, M. Šlapanská, M. Zemánek, P. Vašina
Plasma Sources Science and Technology 26 (2017) 055015 - Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure andmechanical properties
P. Souček, J. Daniel, J. Hnilica, K. Bernátová, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Surface & Coatings Technology 311 (2017) 257-267 - Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
P. Klein, F. Lockwood Estrin, J. Hnilica, P. Vašina, J.W. Bradley
Journal of Physics D: Applied Physics 50 (2017) 015209 - Characterization of Ta-B-C nanostructured hard coatings
J. Buršík, V. Buršíková, P. Souček, L. Zábranský, P. Vašina
IOP Conference Series-Materials Science and Engineering 175 (2017) 012020
2016
- On the study of the mechanical properties of Mo-B-C coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, J. Buršík
The European Physical Journal - Applied Physics 75 (2016) 24716-p1 - 24716-p7 - Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions
R. Žemlička, M. Jílek, P. Vogl, J. Šrámek, P. Souček, V. Buršíková, P. Vašina
Surface & Coatings Technology 304 (2016) 9-15
2015
- Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy
P. Vašina, M. Fekete, J. Hnilica, P. Klein, L. Dosoudilová, P. Dvořák, Z. Navrátil
Plasma Sources Science and Technology 24 (2015) 065022 - Comparative analysis of thermal stability of two different nc-TiC/a-C:H coatings
L. Zábranský, V. Buršíková, J. Daniel, P.Souček, P. Vašina, J. Dugáček, P. Sťahel, O. Caha, J. Buršík, V. Peřina
Surface & Coatings Technology 267 (2015) 32-39
2014
- Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
A.A. El Mel, E. Gautron, F. Christien, B. Angleraud, A. Granier, P. Souček, P. Vašina, V. Buršíková, M. Takashima, N. Ohtake, H. Akasaka, T. Suzuki, P.Y. Tessier
Surface & Coatings Technology 256 (2014) 41-46 - On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
P. Souček, T. Schmidtová, L. Zábranský, V. Buršíková, P. Vašina, O. Caha, J. Buršík, V. Peřina, R. Mikšová, Y.T. Pei, J.Th.M. De Hosson
Surface & Coatings Technology 255 (2014) 8-14 - Understanding of hybrid PVD-PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron
R. Žemlička, M. Jílek, P. Vogl, P. Souček, V. Buršíková, J. Buršík, P. Vašina
Surface & Coatings Technology 255 (2014) 118-123 - Study of the thermal dependence of mechanical properties, chemical composition and structure of nanocomposite TiC/a-C:H coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, T. Gardelka, P. Sťahel. O. Caha, V. Peřina, J. Buršík
Surface & Coatings Technology 242 (2014) 62-67 - Tribological properties of nc-TiC/a-C:H coatings prepared by magnetron sputtering at low and high ion bombardment of the growing film
P. Souček, T. Schmidtová, V. Buršíková, P. Vašina, Y.T. Pei, J.Th.M. De Hosson, O. Caha, V. Peřina, R. Mikšová, P. Malinský
Surface & Coatings Technology 241 (2014) 64-73
2013
- Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply
T. Schmidtová, P. Souček, V. Kudrle, P. Vašina
Surface & Coatings Technology 232 (2013) 283-289 - Laser desorption ionisation quadrupole ion trap time-of-flight mass spectrometry of titanium-carbon thin films
F. Amato, N.R. Panyala, P. Vašina, P. Souček, J. Havel
Rapid Communications in Mass Spectrometry 27 (2013) 1196-1202
2012
- Evaluation of composition, mechanical properties and structure of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering
P. Souček, T. Schmidtová, L. Zábranský, V. Buršíková, P. Vašina, O. Caha, M. Jílek, A.A. El Mel, P.Y. Tessier, J. Schäfer, J. Buršík, V. Peřina, R. Mikšová
Surface & Coatings Technology 211 (2012) 111-116
2011
- Study of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene
T. Schmidtová, P. Souček, P. Vašina, J. Schäfer
Surface & Coatings Technology 205 (2011) S299-S302 - Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
P. Vašina, P. Souček, T. Schmidtová, M. Eliáš, V. Buršíková, M. Jílek, M. Jílek jr., J. Schäfer, J. Juršík
Surface & Coatings Technology 205 (2011) S53-S56 - Study of the indentation response of nanocomposite n-TiC/a-C:H coatings
L. Zábranský, V. Buršíková, J. Buršík, P. Vašina, P. Souček, O. Caha, M. Jílek, V. Peřina
Chemické listy 106 (2011) S1508-S1511