Back to equipment

Thin film deposition system
Alcatel SCM 650

  • Manufacturer: Alacatel, Sweden
  • Sputtering sources: up to 4
  • Target types: circular (3", 8") and rectangular (3" x 10")
  • Targets: Al, Cr, Cu, Nb, Ta, Ti, W, C
  • Power supplies: DC, RF, HiPIMS
  • Base pressure: 1E-4 Pa