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Diagnostic method
Probe diagnostics
- Types of Probes: Langmuir, strip, emissive, optical
- Strip Probes: The measurement of local current on the target. strip probes are incorporated in the target but isolated from the rest of the target. Each strip probe is connected to the power supply to maintain the potential equal to the rest of the target. The strip probe current contribution to the total discharge current is measured separately for each probe. The temporal evolution of the current density could be determined in both non-reactive and reactive magnetron sputtering.
- Range of Optical Probes: 350 - 1100 nm