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Semion RFEA System
- Manufacturer: Impedans Plasma Measurement, Ireland
- Model: single sensor
- Compatible Plasma Types: dc, p-dc, RF, p-RF, microwave, HiPIMS
- Time Step Resolution: 1 µs
- Energy Resolution: 1 eV
- Voltage Scan Range: ± 2000 V
- Maximal Operating Temperature: 150°C