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XPS spectrometer
ESCALAB 250Xi
- Manufacturer: Thermo Fisher Scientific, United Kingdom
- Energy Resolution: ≤ 0.45 eV (Ag 3d5/2)
- Depth Profiling: destruction-free analysis ≤ 10 nm; destructive up to 1 µm
- Small Area XPS: 20-900 µm
- Methods: UV-XPS, REELS, ISS
- Additional information: 2D mapping (spatial resolution < 3 µm)