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Scanning electron microscope
Tescan MIRA3
- Manufacturer: Tescan, Czech Republic
- Chamber size: 340 mm x 315 mm with motorized stage
- Maximal resolution: 1 nm @ 30 kV
- Magnification: 2x - 1 000 000x
- Electron gun: Schottky Field Emission
- Detectors: SE, BSE, InBeam-SE, InBeam-BSE
- Chemical analysis: EDX, WDX, EBIC