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Conference: AEPSE 2019
Matej Fekete talked about influence of ionized sputtered species on hysteresis behavior of reactive HiPIMS at the 12th Asian-European International Conference on PLasma Surface Engineering, which was held in Jeju (South Korea).
Oral contribution:
- Sputtered Species Ionisation and Hysteresis Behaviour of Reactive High Power Impulse Magnetron Sputtering
