Conference: AEPSE 2019

Matej Fekete talked about influence of ionized sputtered species on hysteresis behavior of reactive HiPIMS at the 12th Asian-European International Conference on PLasma Surface Engineering, which was held in Jeju (South Korea).

Oral contribution:

  • Sputtered Species Ionisation and Hysteresis Behaviour of Reactive High Power Impulse Magnetron Sputtering