Deposition system Flexilab from HVM

The computer controlled thin-film laboratory deposition system called Flexilab was developed by company HVM Plasma (Prague, Czech Republic) which focuses on thin-film coating technology by PVD and PACVD. This system, despite its compact design enables us to deposit advanced thin film materials such as high-entropy alloys or various compounds. The substrate can be heated up to 800 degree Celsius and the cathode can be driven by DC, RF, pulsed DC or even by HiPIMS.

HVM Plasma spol. s r.o.