PVD Laboratory

On January 19th, we had the pleasure to hear the lecture called Reactive and Hybrid PVD-PECVD HiTUS of Ti-Zr-Hf-Me-N and W-C:H coatings which was given by Assoc. Prof. František Lofaj from the Slovak Academy of Sciences. The lecture dealt with the latest findings of hybrid processes in the HiTUS system, which main advantage is high use of the target in comparison to other magnetron sputtering systems.