PVD Laboratory

Doc. Tomas Nyrberg accepted an invitation from doc. Souček and visited us at the end of October. Tomas Nyrberg is currently a Senior Researcher at the Thin Film Group at Ångström Laboratory, Uppsala University, Sweden. His research is focused on experiments and modeling of reactive sputtering thin-film processing. Current projects include dynamic modeling and controlling of the reactive sputtering process and the exploration of novel ways of stabilizing the process. During his visit, he gave a lecture about simulations of sputter deposition process and its connection to experimental studies he performed.

Lecture:

• Experimental studies and simulations of the sputter deposition process