Workshop at RWTH Aachen
On October 9th 2019 our three colleagues - Klein, Fekete and Hnilica attended a workshop at RWTH Aachen University in Germany. They were invited in the frame of the SFB-TR 87 project. During this workshop, the results of our team about investigations of ionization zones in high power impulse magnetron sputtering (HiPIMS), determination of sputtered species number densities in HiPIMS discharge using both optical-emission spectroscopy, absorption spectroscopy and laser-induced fluorescence were presented.
- Peter Klein: Spokes behaviour in both non-reactive and reactive HiPIMS
- Matej Fekete: Ground state number density determination in sputter deposition plasmas by optical emission spectroscopy
- Jaroslav Hnilica: Time-resolved imaging of sputtered particles in HiPIMS discharge