Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
K. Bernátová, M. Fekete, P. Klein, J. Hnilica, P. Vašina
In this paper, the ground state number densities of titanium atom and ion, ionised density fraction and ionised flux fraction were determined. The effective branching fractions method was utilised to evaluate the number densities of sputtered species. The highest ionised density fraction of 90% was reached in the target region for 1.2% duty cycle. In the substrate region for a duty cycle below 2%, the ionised density fraction always reached at least 50%.
Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target
M. Kroker, P. Souček, M. Šlapanská, V. Sochora, M. Jílek, P. Vašina
This work presents an approach for the prediction of the composition and the deposition rate of the coatings. The simulated chemical composition and the relative deposition rate were verified and validated by experiments. A correlation between the chemical composition and target segment placement is presented, and the influence of substrate movement on the chemical composition is discussed. The simulations uncover the distinct trajectories of the heavy and light particles.
Spatially resolved study of spokes in reactive HiPIMS discharge
M. Šlapanská, M. Kroker, P. Klein, J. Hnilica, P. Vašina
This contribution gives an insight into the spokes in the Ar–N2 atmosphere using the Ti target. The aim is to describe not only the global parameters of spokes, such as their shape, length, and propagation velocity but also provide a description of parameters evolving over the spoke, such as floating potential and spectral emission. The measurements of the latter clearly showed which species emission is most prominent and how it changes with the transition from argon discharge towards the discharge driven in a pure nitrogen atmosphere.
Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS
P. Souček, J. Hnilica, P. Klein, M. Fekete, P. Vašina
In this paper, standard single-pulse HiPIMS (s-HiPIMS), multipulse HiPIMS (m-HiPIMS), and conventional direct current magnetron sputtering were employed to deposit metallic Ti coatings. Varying the number of pulses in one pulse sequence in m-HiPIMS operation enables to influence the ion fluxes on the substrate and the ionisation of the sputtered titanium. By the use of m-HiPIMS, it was possible to achieve coatings with a smoother surface morphology and lower roughness. The texture and the deposition rate were significantly affected by the number of pulses, too.
List of all publications
2024
- Exploring different approaches of multipulse HiPIMS
J. Hnilica, P. Souček, M. Ondryáš, P. Klein, M. Fekete, P. Vašina
Surface and Coatings Technology (2024) - Investigation of the failure mechanisms of Zr alloy with Cr2AlC coatings using in-situ bending tests: Experiments and Simulations
B. Pan , F. Shen, M. Fekete, D. J. Ramesh, J. Schneider, S.Münstermann
Engineering Failure Analysis (2024) 108964 - Floating potential probes for process control during reactive magnetron sputtering
J. Van Bever, P. Vašina, R. Drevet, K. Strijckmans, D. Depla
Surface and Coatings Technology 494 (2024) 131405 - Bond Formation at Polycarbonate | X Interfaces (X = Al2O3, TiO2, TiAlO2) Studied by Theory and Experiments
Lena Patterer, Pavel Ondračka, Dimitri Bogdanovski, Stanislav Mráz, Peter J. Pöllmann, Soheil Karimi Aghda, Petr Vašina, Jochen M. Schneider
Advanced Materials Interfaces (2024) 2400340 - Enhancement of ionised metal flux fraction without compromising deposition rate in industrial magnetron sputtering
P. Klein, J. Hnilica, V. Sochora, P. Souček, M. Fekete, P. Vašina
Surface and Coatings Technology 489 (2024) 131142 - On direct-current magnetron sputtering at industrial conditions with high ionization fraction of sputtered species
J. Hnilica, P. Klein, M. Učík, S. Debnárová, J. Klusoň, P. Vašina
Surface and Coatings Technology 487 (2024) 131028 - Spatially resolved optical emission analysis of spokes in HiPIMS utilising Al, Cr, Cu, Ti, and W targets
J. Hnilica, M. Šlapanská, M. Kroker, P. Klein, P. Vašina
Plasma Sources Science and Technology 33 (2024) 065009 - Synthesis and characterization of ceramic high entropy carbide thin films from the Cr-Hf-Mo-Ta-W refractory metal system
T. Stasiak, S. Debnárová, S. Lin, N. Koutná, Z. Czigány, K. Balázsi, V. Buršíková, P. Vašina, P. Souček
Surface and Coatings Technology 485 (2024) 130839 - A Long-Term Study on the Bactericidal Effect of ZrN-Cu Nanostructured Coatings Deposited by an Industrial Physical Vapor Deposition System
S. Behrangi, E. Staňková, I. Sedláček, L. Šimoníková, P. Souček, V. Buršíková, V. Sochora, K. Novotný, P. Vašina
Nanomaterials 14 (2024) 496 - Effect of Nb incorporation in Mo2BC coatings on structural and mechanical properties — ab initio modelling and experiment
J. Ženíšek, P. Souček, P. Ondračka, Z. Czigány, V. Buršíková, D. Holec, K. Balázsi, P. Vašina
Acta Materialia 268 (2024) 119741 - High-power-density sputtering of industrial-scale targets: Case study of (Al, Cr)N
F.F. Klimashin, J. Klusoň, M. Učík, R. Žemlička, M. Jílek, A. Lümkemann, J. Michler, T.E.J. Edwards
Materials & Design 237 (2024) 112553 - Aluminum tantalum oxide thin films deposited at low temperature by pulsed direct current reactive magnetron sputtering for dielectric applications
R. Drevet, P. Souček, P. Mareš, P. Ondračka, M. Dubau, T. Kolonits, Z. Czigány, K. Balázsi, P. Vašina
Vacuum 221 (2024) 112881
2023
- Temporal, spatial and spectroscopic study of plasma emission on Cu target in bipolar HiPIMS
P. Klein, J. Hnilica, D. Lundin, P. Dvořák, M. Zanáška, U. Helmersson, P. Vašina
Plasma Sources Science and Technology 32 (2023) 075019 - Dynamics of sputtered particles in multipulse HiPIMS discharge
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Plasma Sources Science and Technology 32 (2023) 045003 - NOMAD: A distributed web-based platform for managing materials science research data
M. Scheidgen, L. Himanen, A. N. Ladines, D. Sikter, M. Nakhaee, Á. Fekete, T. Chang, A. Golparvar, J. A. Márquez, S. Brockhauser, S. Brückner, L. M. Ghiringhelli, F. Dietrich, D. Lehmberg, T. Denell, A. Albino, H. Näsström, S. Shabih, F. Dobener, M. Kühbach, R. Mozumder, J. F. Rudzinski, N. Daelman, J. M. Pizarro, M. Kuban, C. Salazar, P. Ondračka, H.-J. Bungartz, C. Draxl
The Journal of Open Source Software 8 (2023) 5388 - Dynamic Impact Resistance and Scratch Adhesion of AlCrN Coatings Sputtered Using Cathodic Arc Glow Discharge
J. Daniel, R. Žemlička, M. Alishahi, P. Karvánková, P. Souček, D. Karpinski, T. Fořt, H. Bolvardi, A. Lümkemann, P. Vašina
Coatings 13 (2023) 515 - Correlative Theoretical and Experimental Study of the Polycarbonate | X Interfacial Bond Formation (X = AlN, TiN, (Ti,Al)N) During Magnetron Sputtering
L. Patterer, P. Ondračka, D. Bogdanovski, S. Mráz, S. Karimi Aghda, P. J. Pöllmann, Y. Chien, J. M. Schneider
Advanced Materials Interfaces 10 (2023) 2300215 - On the determination of the thermal shock parameter of MAX phases: A combined experimental-computational study
M. Fekete, C. Azina, P. Ondračka, L. Löfler, D. Bogdanovski, D. Primetzhofer, M. Hans, J. M. Schneider
Journal of the European Ceramic Society 43 (2023) 5484-5492 - Phase formation of powders sputtered from X2BC targets and XC+XB powder mixtures {X = Nb, Ta, W}
S. Debnárová, P. Souček, P. Ondračka, D.M. Holzapfel, S. Mráz, J.M. Schneider, P. Vašina
Surface and Coatings Technology 458 (2023) 129379 - Multilayer thin films of aluminum oxide and tantalum oxide deposited by pulsed direct current magnetron sputtering for dielectric applications
R. Drevet, P. Souček, P. Mareš, M. Dubau, Z. Czigány, K. Balázsi, P. Vašina
Vacuum 210 (2023) 111870 - Industrially deposited hard and damage resistant W-B-C coatings
M. Kroker, P. Souček, L. Zábranský, V. Buršíková, Z. Czigány, V. Sochora, K. Balázsi, M. Jílek, P. Vašina
Surface and Coatings Technology 454 (2023) 129150
2022
- Synthesis and characterization of the ceramic refractory metal high entropy nitride thin films from Cr-Hf-Mo-Ta-W system
T. Stasiak, P. Souček, V. Buršíková, N. Koutná, Zs. Czigány, K. Balázsi, P. Vašina
Surface and Coatings Technology 449 (2022) 128987 - An Assessment of the Bactericidal and Virucidal Properties of ZrN-Cu Nanostructured Coatings Deposited by an Industrial PVD System
S. Behrangi, I. Sedláček, J. Štěrba, G. Suková, Zs. Czigány, V. Buršíková, P. Souček, V. Sochora, K. Balázsi, P. Vašina
Coatings 12 (2022) 1330 - Modelling of dcMS and HiPIMS process with hydrocarbon gas admixture
M. Fekete, M. Kroker, P. Souček, P. Klein, P. Vašina
Plasma Sources Science and Technology 31 (2022) 065008 - Spatially resolved study of spokes in reactive HiPIMS discharge
M. Šlapanská, M. Kroker, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 31 (2022) 055010 - Predicting the composition of W-B-C coatings sputtered from industrial cylindrical segmented target
M. Kroker, P. Souček, M. Šlapanská, V. Sochora, M. Jílek, P. Vašina
Surface and Coatings Technology 438 (2022) 128411 - Dynamics of bipolar HiPIMS discharges by plasma potential probe measurements
M. Zanáška, D. Lundin, N. Brenning, Hao Du, P. Dvořák, P. Vašina, U. Helmersson
Plasma Sources Science and Technology 31 (2022) 025007 - Synthesis and characterization of Ta–B–C coatings prepared by DCMS and HiPIMS co-sputtering
M. Polaček, P. Souček, M. Alishahi, N. Koutná, P. Klein, L. Zábranský, Zs. Czigány, K. Balázsi, P. Vašina
Vacuum 199 (2022) 110937 - W 4f electron binding energies in amorphous W-B-C systems
J. Ženíšek, P. Ondračka, J. Čechal, P.Souček, D. Holec, P.Vašina
Applied Surface Science 586 (2022) 152824 - Phase formation, thermal stability and mechanical properties of Nb-B-C coatings prepared by combinatorial magnetron sputtering
S. Debnárová, P. Souček, V. Buršíková, M. Hans, D. M. Holzapfel, S. Mráz, J. M. Schneider, P. Vašina
Surface and Coatings Technology 433 (2022) 128137 - Single-shot spatial-resolved optical emission spectroscopy of argon and titanium species within the spoke
M. Šlapanská, M. Kroker, J. Hnilica, P. Klein, P. Vašina
Journal of Physics D: Applied Physics 55 (2022), 035205
2021
- Temporal studies of titanium ionised density fraction in reactive HiPIMS with nitrogen admixture
K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 30 (2021) 125002 - Microstructure of titanium coatings controlled by pulse sequence in multipulse HiPIMS
P. Souček J. Hnilica, P. Klein, M. Fekete, P. Vašina
Surface and Coatings Technology 423 (2021) 127624 - Enhancing mechanical properties and cutting performance of industrially sputtered AlCrN coatings by inducing cathodic arc glow discharge
R. Žemlička, M. Alishahi, M. Jílek, P. Souček, J. Daniel, J. Klusoň, H. Bolvardi, A. Lumkemann, P. Vašina
Surface and Coatings Technology 422 (2021) 127563 - Spoke behaviour in reactive HiPIMS
P. Klein, J. Hnilica, M. Fekete, M. Šlapanská, P. Vašina
Plasma Sources Science and Technology 30 (2021) 055016
2020
- Composition, Structure and Mechanical Properties of Industrially Sputtered Ta–B–C Coatings
M. Kroker, P. Souček, P. Matej, L. Zábranský, Z. Czigány, K. Balázsi, P. Vašina
Coatings 10(9) (2020) 853 - The Effect of a Taper Angle on Micro-Compression Testing of Mo-B-C Coatings
L. Zábranský, K. Bernátová, J. Dluhoš, R. Váňa, P. Souček, P. Vašina, V. Buršíková
Materials 13 (2020) 3054 - Revisiting particle dynamics in HiPIMS discharges. II. Plasma pulse effects
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Journal of Applied Physics 128 (2020) 043304 - Revisiting particle dynamics in HiPIMS discharges. I. General effects
J. Hnilica, P. Klein, P. Vašina, R. Snyders, N. Britun
Journal of Applied Physics 128 (2020) 043303 - Effect of substrate bias voltage on the composition, microstructure and mechanical properties of W-B-C coatings
S. Mirzaei, M. Alishahi, P. Souček, V. Buršíková, L.Zábranský, L.Gröner, F. Burmeister, B. Blug, Ph. Daum, R. Mikšová, P. Vašina
Applied Surface Science 528 (2020) 146966 - Optical spectroscopy for sputtering process characterization
N. Britun, J. Hnilica
Journal of Applied Physics 127 (2020) 211101 - Ionisation fractions of sputtered titanium species at target and substrate region in HiPIMS
K. Bernátová, M. Fekete, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 29 (2020) 055010 - Study of the transition from self-organised to homogeneous plasma distribution in chromium HiPIMS discharge
M. Šlapanská, A. Hecimovic, J. T. Gudmundsson, J. Hnilica, W. Breilmann, P. Vasina, A. von Keudell
Journal of Physics D: Applied Physics 53 (2020) 155201 - The effect of chemical composition on the structure, chemistry and mechanical properties of magnetron sputtered W-B-C coatings: Modeling and experiments
S. Mirzaei, M. Alishahi, P. Souček, J. Ženíšek, D. Holec, N. Koutná, V. Buršíková, M. Stupavská, L. Zábranský, F. Burmeister, B. Blug, Zs. Czigány, K. Balázsi, R. Mikšová, P. Vašina
Surface and Coatings Technology 383 (2020) 125274 - A transition from petal-state to lotus-state in AZ91 magnesium surface by tailoring the microstructure
M. Safarpoura, S. A. Hosseini, F. Ahadani-Targhi, P. Vašina, M. Alishahi
Surface and Coatings Technology 383 (2020) 125239 - Adhesion and dynamic impact wear of nanocomposite TiC-based coatings prepared by DCMS and HiPIMS
J. Daniel, P. Souček, J. Grossman, L. Zábranský, K. Bernátová, V. Buršíková, T. Fořt, P. Vašina, J. Sobota
International Journal of Refractory Metals and Hard Materials 86 (2020) 105123 - Multi-component (Al,Cr,Nb,Y,Zr)N thin films by reactive magnetron sputter deposition for increased hardness and corrosion resistance
K. von Fieandt, E. M. Paschalidou, A. Srinath, P. Souček, L. Riekehr, L. Nyholm, E. Lewin,
Thin Solid Films 693 (2020) 137685 - Influence of sputtered species ionisation on the hysteresis behaviour of reactive HiPIMS with oxygen admixture
M. Fekete, K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 29 (2020) 025027
2019
- Study of W-B-C thin films prepared by magnetron sputtering using a combinatorial approach
S. Debnárová, L. Zábranský, P. Souček, V.Buršíková, P. Vašina
International Journal of Refractory Metals and Hard Materials 85 (2019) 105066 - Microstructural changes of amorphous Mo–B–C coatings upon thermal annealing
L. Zábranský, P. Souček, P. Vašina, J. Dugáček, P. Sťahel, J. Buršík, M. Svoboda, R. Mikšová, V. Peřina, K. Balázsi, Z. Czigány, V. Buršíková
Surface and Coatings Technology 379 (2019) 125052 - On the origin of multilayered structure of W-B-C coatings prepared by non-reactive magnetron sputtering from a single segmented target
M. Kroker, Zs. Czigány, Z. Weiss, M. Fekete, P. Souček, K. Balázsi, V. Sochora, M. Jílek, P. Vašina
Surface and Coatings Technology 377 (2019) 124864 - Evolution of discharge parameters and sputtered species ionization in reactive HiPIMS with oxygen, nitrogen and acetylene
M. Fekete, K. Bernátová, P. Klein, J. Hnilica, P. Vašina
Plasma Sources Science and Technology 28 (2019) 025011 - Effect of bonding structure on hardness and fracture resistance of W-B-C coatings with varying B/W ratio
S. Mirzaei, M. Alishahi, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, V. Peřina, K. Balázsi, Zs. Czigány, P. Vašina
Surface & Coatings Technology 358 (2019) 843-849 - The statistics of spoke configurations in high-power impulse magnetron sputtering discharges
P. Klein , J. Hnilica, M. Zemánek, J. W. Bradley, P. Vašina
Journal of Physics D: Applied Physics 52 (2019) 125201
2018
- The tribological properties of short range ordered W-B-C protective coatings prepared by pulsed magnetron sputtering
S. Debnárova, P. Souček, P. Vašina, L. Zábranský, V. Buršíková, S. Mirzaei, Y. Pei
Surface & Coatings Technology 357 (2018) 364-371 - Effect of magnetic field on spoke behaviour in HiPIMS plasma
J. Hnilica, P. Klein, M. Šlapanská, M. Fekete, P. Vašina
Journal of Physics D: Applied Physics 51 (2018) 095204 - Evolution of structure and mechanical properties of hard yet fracture resistant W-B-C coatings with varying C/W ratio
M. Alishahi, S. Mirzaei, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, V. Peřina, K. Balázsi, Zs. Czigány, P. Vašina
Surface & Coatings Technology 340 (2018) 103-111 - Fracture resistance enhancement in hard Mo-B-C coatings tailored by composition and microstructure
P. Souček, L. Zábranský, V. Buršíková, J. Buršík, S. Debnarova, M. Svoboda, V. Perina, P. Vašina
Journal of Nanomaterials (2018) 5184584
2017
- Ti atom and Ti ion number density evolution in standard and multi-pulse HiPIMS
M. Fekete, J. Hnilica, C. Vitelaru, T. Minea, P. Vašina
Journal of Physics D: Applied Physics 50 (2017) 365202 - On the effect of the substrate to target position on the properties of titanium carbide/carbon coatings
J. Daniel, P. Souček, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Surface & Coatings Technology 328 (2017) 462-468 - Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings
J. Daniel, P. Souček, K. Bernátová, L. Zábranský, M. Stupavská, V. Buršíková, P. Vašina
Journal of Nanomaterials 166 (2017) 1-13 - Thermal stability of hard nanocomposite Mo-B-C coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, J. Dugáček, P. Sťahel, J. Buršík, M. Svoboda, V. Peřina
Vacuum 138 (2017) 199-204 - On the significance of running-in of hard nc-TiC/a-C:H coating for short-term repeating machining
R. Žemlička, P. Souček, P. Vogl, M. Jílek, V. Buršíková, P. Vašina, Y. Pei
Surface & Coatings Technology 315 (2017) 17-23 - Cathode voltage and discharge current oscillations in HiPIMS
P. Klein, J. Hnilica, Z. Hubička, M. Čada, M. Šlapanská, M. Zemánek, P. Vašina
Plasma Sources Science and Technology 26 (2017) 055015 - Superhard nanocomposite nc-TiC/a-C:H coatings: The effect of HiPIMS on coating microstructure andmechanical properties
P. Souček, J. Daniel, J. Hnilica, K. Bernátová, L. Zábranský, V. Buršíková, M. Stupavská, P. Vašina
Surface & Coatings Technology 311 (2017) 257-267 - Simultaneous electrical and optical study of spoke rotation, merging and splitting in HiPIMS plasma
P. Klein, F. Lockwood Estrin, J. Hnilica, P. Vašina, J.W. Bradley
Journal of Physics D: Applied Physics 50 (2017) 015209 - Characterization of Ta-B-C nanostructured hard coatings
J. Buršík, V. Buršíková, P. Souček, L. Zábranský, P. Vašina
IOP Conference Series-Materials Science and Engineering 175 (2017) 012020
2016
- On the study of the mechanical properties of Mo-B-C coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, J. Buršík
The European Physical Journal - Applied Physics 75 (2016) 24716-p1 - 24716-p7 - Principles and practice of an automatic process control for the deposition of hard nc-TiC/a-C:H coatings by hybrid PVD-PECVD under industrial conditions
R. Žemlička, M. Jílek, P. Vogl, J. Šrámek, P. Souček, V. Buršíková, P. Vašina
Surface & Coatings Technology 304 (2016) 9-15
2015
- Determination of titanium atom and ion densities in sputter deposition plasmas by optical emission spectroscopy
P. Vašina, M. Fekete, J. Hnilica, P. Klein, L. Dosoudilová, P. Dvořák, Z. Navrátil
Plasma Sources Science and Technology 24 (2015) 065022 - Comparative analysis of thermal stability of two different nc-TiC/a-C:H coatings
L. Zábranský, V. Buršíková, J. Daniel, P.Souček, P. Vašina, J. Dugáček, P. Sťahel, O. Caha, J. Buršík, V. Peřina
Surface & Coatings Technology 267 (2015) 32-39
2014
- Titanium carbide/carbon nanocomposite hard coatings: A comparative study between various chemical analysis tools
A.A. El Mel, E. Gautron, F. Christien, B. Angleraud, A. Granier, P. Souček, P. Vašina, V. Buršíková, M. Takashima, N. Ohtake, H. Akasaka, T. Suzuki, P.Y. Tessier
Surface & Coatings Technology 256 (2014) 41-46 - On the control of deposition process for enhanced mechanical properties of nc-TiC/a-C:H coatings with DC magnetron sputtering at low or high ion flux
P. Souček, T. Schmidtová, L. Zábranský, V. Buršíková, P. Vašina, O. Caha, J. Buršík, V. Peřina, R. Mikšová, Y.T. Pei, J.Th.M. De Hosson
Surface & Coatings Technology 255 (2014) 8-14 - Understanding of hybrid PVD-PECVD process with the aim of growing hard nc-TiC/a-C:H coatings using industrial devices with a rotating cylindrical magnetron
R. Žemlička, M. Jílek, P. Vogl, P. Souček, V. Buršíková, J. Buršík, P. Vašina
Surface & Coatings Technology 255 (2014) 118-123 - Study of the thermal dependence of mechanical properties, chemical composition and structure of nanocomposite TiC/a-C:H coatings
L. Zábranský, V. Buršíková, P. Souček, P. Vašina, T. Gardelka, P. Sťahel. O. Caha, V. Peřina, J. Buršík
Surface & Coatings Technology 242 (2014) 62-67 - Tribological properties of nc-TiC/a-C:H coatings prepared by magnetron sputtering at low and high ion bombardment of the growing film
P. Souček, T. Schmidtová, V. Buršíková, P. Vašina, Y.T. Pei, J.Th.M. De Hosson, O. Caha, V. Peřina, R. Mikšová, P. Malinský
Surface & Coatings Technology 241 (2014) 64-73
2013
- Non-monotonous evolution of hybrid PVD–PECVD process characteristics on hydrocarbon supply
T. Schmidtová, P. Souček, V. Kudrle, P. Vašina
Surface & Coatings Technology 232 (2013) 283-289 - Laser desorption ionisation quadrupole ion trap time-of-flight mass spectrometry of titanium-carbon thin films
F. Amato, N.R. Panyala, P. Vašina, P. Souček, J. Havel
Rapid Communications in Mass Spectrometry 27 (2013) 1196-1202
2012
- Evaluation of composition, mechanical properties and structure of nc-TiC/a-C:H coatings prepared by balanced magnetron sputtering
P. Souček, T. Schmidtová, L. Zábranský, V. Buršíková, P. Vašina, O. Caha, M. Jílek, A.A. El Mel, P.Y. Tessier, J. Schäfer, J. Buršík, V. Peřina, R. Mikšová
Surface & Coatings Technology 211 (2012) 111-116
2011
- Study of hybrid PVD-PECVD process of Ti sputtering in argon and acetylene
T. Schmidtová, P. Souček, P. Vašina, J. Schäfer
Surface & Coatings Technology 205 (2011) S299-S302 - Depth profile analyses of nc-TiC/a-C:H coating prepared by balanced magnetron sputtering
P. Vašina, P. Souček, T. Schmidtová, M. Eliáš, V. Buršíková, M. Jílek, M. Jílek jr., J. Schäfer, J. Juršík
Surface & Coatings Technology 205 (2011) S53-S56 - Study of the indentation response of nanocomposite n-TiC/a-C:H coatings
L. Zábranský, V. Buršíková, J. Buršík, P. Vašina, P. Souček, O. Caha, M. Jílek, V. Peřina
Chemické listy 106 (2011) S1508-S1511